Structure and Property of Diamond-like Carbon Coating with Si and O Co-Doping Deposited by Reactive Magnetron Sputtering

In this paper, diamond-like carbon (DLC) coatings with Si and O co-doping (Si/O-DLC) were deposited by reactive magnetron sputtering using a gas mixture of C2H2, O2 Ar to sputter silicon/graphite splicing target. The content in the Si/O-DLC was controlled tuning flux mixture. composition, chemical bond structure, mechanical properties tribological behavior investigated X-ray photoelectron spectroscopy, Fourier infrared spectrometer, Raman nanoindentation, scratch tester ball-on-disk tribometer. electrical resistivity also studied four-point probe method. results show that doping tends form silicon–oxygen compound, causing decrease sp3 as well hardness coatings. performance can be improved due formation which effectively reduce friction coefficient. addition, insulating compound is doped into C-C network significantly improving surface DLC coating low content. good properties, insulation might used protection layers for microelectronics.